The basic function of a test single, multi-layered translucent film thickness, refractive index and absorption coefficient of 2, to achieve uniformity of the film detection 3, the reflection, projection and color measurement Product Features l powerful data processing operations and materials NK database; l simple and easy visualization of test interface, you can set different parameters according to user needs; l fast, accurate and stable parameters of the test; l Supports multi-functional integration and customization accessories; l support different levels of user control mode; l support multi- functional simulation and so on. System configuration l Model: SR300 l Detector: 2048-pixel CCD line array l Light source: high stability, long life halogen l light transmission: Fiber l Bench Platform: Aluminum special treatment, can easily adjust the sample weight, 200mmx200mm size l software: TFProbe 2.2 version of the software l Communication Interface: USB communication interface with a computer connected to the l measurement types: film thickness, reflectance spectra, refractive index l PC hardware requirements: P3 above the minimum 50 MB of space l Power: 110-240V AC / 50-60Hz, 1.5A l Warranty: machine and spare parts warranty specifications l year wavelength range: 400nm to 1100 nm l spot size: 500μm to 5mm l sample size: 200mmx200mm or diameter of 200mm l substrate size: Up to 50 mm thick l measure the thickness range *: 2nm 50μm l Measuring time:? The fastest 2 ms l * Accuracy: better than 0.5% (by using the same optical constants, so the results ellipsometer Compared with the thermal oxide sample) l repeatability error *: Less than 1 l optional items for delivery and absorption measurements of transmission jig (SR300RT) ?? l lowest measurable diameter of 5μm micro spot size (MSP300)? l at multiple locations, multiple channels for simultaneous measurement (SR300xX) l in more than 200 or 300 mm wafers were unified mapping (SRM300-200 / 300) applications are mainly used in the field of translucent film analysis class: l glass coating areas (LowE, solar ...) l Semiconductor Manufacturing (PR, Oxide, Nitride ...) l LCD (ITO, PR, Cell gap ...) l medicine, biology and materials fields of film l ink, mineralogy, pigments, toners and the like l medicine, intermediate apparatus l optical coatings, TiO2, SiO2, Ta2O5 ... .. l l semiconductor compound on MEMS / MOEMS system functional film l amorphous, nano-crystalline silicon material and